منابع مشابه
MEMS arrays for deformable mirrors
A new class of silicon-based deformable mirror for use in optical applications such as adaptive optical systems and optical correlators is being built. The mirror will be a massively parallel system of electrostatically-controlled, interconnected microactuators that can be coordinated to achieve precise actuation and control at a macroscopic level. The deformable mirror system described here wi...
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We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imagi...
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OVERVIEW Mirrorcle Technologies Gimbal-less Two-Axis Scanning MEMS Mirror Devices are based on proprietary ARI-MEMS fabrication technology initially developed through research projects at the Adriatic Research Institute (“ARI”) in Berkeley, CA. They provide very fast optical beam steering across two axes, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scan...
متن کاملUsing MEMS mirrors to pattern electrical forces
By switching between two tilt angles MEMS mirrors can be used to produce spatial light patterns. This enables the Digital Micromirror Display (DMD, Texas Instruments) chip to produce the images found in some data projectors. In this paper we will show how these images can be converted into electrical patterns. We use the electrical gradients in these patterns to control the movement of particle...
متن کاملMEMS deformable mirrors in astronomical adaptive optics
We report on the development of microelectromechanical (MEMS) deformable mirrors designed for ground and space-based astronomical instruments using adaptive optics. These light-weight, low power deformable mirrors will have an active aperture of up to 25.2mm consisting of thin silicon membrane mirror supported by an array of up to 4096 electrostatic actuators exhibiting no hysteresis and sub-na...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2016
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2016.2562609